Development of atmospheric pressure CVD processes for highquality transparent conductive oxides
نویسندگان
چکیده
منابع مشابه
High mobility annealing of Transparent Conductive Oxides
To improve electrical properties a high temperature annealing treatment was applied to several transparent conductive oxides (TCO), namely tin doped indium oxide (ITO), Gaor Aldoped ZnO (ZnO:Al/Ga), ion beam assisted deposited (IBAD) ZnO:Ga and Ga doped zinc magnesium oxide (ZnMgO:Ga). All these films were grown by magnetron sputtering. During the annealing process all TCO films were capped wit...
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Robert Laskowski,1 Niels Egede Christensen,2 Peter Blaha,1 and Balan Palanivel3 1Institute of Materials Chemistry, Technische Universität Wien, Getreidemarkt 9/165TC, A-1060 Vienna, Austria 2Department of Physics and Astronomy, University of Aarhus, DK-8000 Aarhus C, Denmark 3Department of Physics, Pondicherry Engineering College, Puducherry 605 014, India Received 15 January 2009; revised manu...
متن کاملEffects of electronic and lattice polarization on the band structure of delafossite transparent conductive oxides.
We use hybrid functionals and restricted self-consistent GW, state-of-the-art theoretical approaches for quasiparticle band structures, to study the electronic states of delafossite Cu(Al,In)O2, the first p-type and bipolar transparent conductive oxides. We show that a self-consistent GW approximation gives remarkably wider band gaps than all the other approaches used so far. Accounting for pol...
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We report the visible and UV activity of thin silver films. The films are grown using a CVD process employing aqueous-based silver precursors, flame-assisted chemical vapour deposition. This approach overcomes many of the previously encountered limitations to silver deposition by employing an atmospheric pressure process, low-cost and low-toxicity precursors. The resultant films are assessed fo...
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ژورنال
عنوان ژورنال: Energy Procedia
سال: 2010
ISSN: 1876-6102
DOI: 10.1016/j.egypro.2010.07.008